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- 2020年12月1日 9:13 AM#2301
Semiconductor Manufacturing Technology
by Michael Quirk
- Publisher: Pearson
- Author: Michael Quirk
- Format: paperback, 666 pages
- ISBN: 9780130815200 (0130815209)
- Release date: November 19, 2000
- Language: english
About The Book
In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.
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